This request is an announcement for information/market research for planning purposes. This synopsis does not constitute a request for proposal, request for quote, invitation for bid nor does its issuance, in any way, restrict the Government as to its ultimate acquisition approach. The Air Force Nuclear Weapons Center PKOA, Kirtland AFB, New Mexico is seeking potential sources to provide a Rapid Thermal Processor. CLIN 0001: 1 Each Rapid Thermal Processor General Requirements common to CLIN 0001 DESCRIPTION: A Rapid Thermal Processor (RTP) system is required RDLAS. This RTP system will allow researchers to anneal metals at 450⁰C to semiconductor substrate which will enhance electrical conductivity through the metal/substrate interface and the also allow researchers to heat the edges of the crystal to a temperature of 1000⁰C which repairs crystal damage caused by the Ion Implantation process. This RTP process allows the devices to operate efficiently and be packaged into usable devices. This RTP system is one of about a dozen tools that are required to complete the cleanroom device processing facility which is being assembled at RDLAS. RTP systems are commercially available products, and the user typically specifies several add-on items, such as the required number of mass flow controllers (MFC's), substrate temperature monitoring capability, substrate holding and heating stage called a susceptor, vacuum system and chiller system needed to complete the system. An example of a commercially available product that will meet AFRL needs is the ALLwin21 Corp. system, model AW 610. Any RTP system that meets the specifications described will be acceptable. RTP system main unit SPECIFICATIONS (ALLwin21 corp. #AW610 or equivalent): • Signal wafer process • Gold plated Aluminum chamber with water cooled jacket • 6 inch isolated Quartz tube and tray for 4 to 6 inch diameter wafers • Top and bottom heating • Temperature range 100-1250⁰C with +/-1⁰C accuracy. • Extended Range Pyrometer (ERP) and tube for temperatures from 450C to 1250C or equivalent • Neslab (or equivalent) water chiller for ERP Pyrometer • Thermocouple sensor for room temp to 450C • Gas box with 2 @ 10 SLM Mass flow controllers, shut off valves set up for Nitrogen and 3.8% Hydrogen in Nitrogen balance. • 3 inch graphite susceptor with SiC coating • User programmable with multiple settings • 1C to 150C temperature ramp up • 1C to -150C ramp down • Data logger software with user friendly graphical display and CPU control unit • Safety interlocks • Emergency shut off (EMO) • UL Certification • Operations manual • System should be clean-room ready CRATING AND SHIPPING: • System should be professionally crated to ensure safe transit INSTALLATION: • System installed by factory trained technician/engineer on premises at KAFB, NM • System installed per OEM factor specification • System operational integrity checked and verified in presence of user prior to acceptance TRAINING: • On-site training of three (3) AFRL/RDLAS employees by factory trained technician/engineer WARRANTY: • Minimum of 12 months parts and labor at installation site KAFB, NM • RTP system and all subsystems should be free from any defects in materials, workmanship and system operations for 12 months from acceptance • During the warranty period, all replacement parts must meet all OEM specifications Firms responding to this announcement shall include company name, DUNS number, cage code, point of contact, address and business size using NAICS Code 333994, Size Standard 500 employees. Statement of Capabilities (SOCs), limited to 2 pages and shall demonstrate experience in providing or manufacturing of product or capability to provide products meeting the specifications listed. Statement of Capabilities may be submitted by facsimile at (505) 846-8925 Attn: Bernadette N. Kerkhoff or preferably via E-mail to:
[email protected]. Responses must be received no later than 06 July 2012 at 4:00 p.m. Mountain Standard Time. Identify your response with the corresponding program title: Sources Sought: Rapid Thermal Processor