NASA/GSFC has a requirement for the following items: One(1) March Instruments Model CS-1701F, RIE System, "6" wafer capable with: -Process Chamber 6" Capable -Independent Pressure Control -600 Watt 13.56 MHz RF Power Supply -Automatic R F Tunning Network -Microprocessor Control -Gas Control with Six(6)Mass Flow Controllers (Four on-board and Two remote panel mounted) -RS-232 Port -Endpoint detector -Installation -Mechanical Vacuum Pump Package - 27 CFM One(1) P/N: 016-7105, Remote Operator Interface- Software to allow the CS1701 to communicate with a host PC via an RS232 communications port. This allows for unlimited recipe storage and data logging of each process run for analysis and statistical process control. One(1) P/N: 099-000014, Kit, CS-1701"6" Spares L1 This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation, which is issued as a Request for Quotation (RFQ); quotes are being requested and a written solicitation will not be issued. Offerors are required to use the On-Line RFQ system to submit their quote. The On-line RFQ system is linked above or it may be accessed at http://prod.nais.nasa.gov/cgi-bin/eps/bizops.cgi?gr=C&pin= . The information required by FAR Subpart 12.6 is included in the on-line RFQ. The Government intends to acquire a commercial item using FAR Part 12 and the Simplified Acquisition Procedures set forth in FAR Part 13. Questions regarding this acquisition must be submitted in writing via email to
[email protected] no later than 09/06/2007. It is the quoter's responsibility to monitor this site for the release of amendments (if any). Potential quoters will be responsible for downloading their own copy of this notice, the on-line RFQ and amendments (if any). An ombudsman has been appointed - See NASA Specific Note "B". Any referenced notes may be viewed at the following URLs link below.