Ion Beam Profiler

TECHNOLOGY LICENSING OPPORTUNITY Ion Beam Profiler For laboratories and companies working with ion beams who are dissatisfied with the cost and complexity of current two-dimensional beam profilers, or the lack of relevant information about the ion beam. This technology is for an ion beam profiling system that can reconstruct the ion beam position, size, and intensity in two dimensions using a single simple measurement device. Opportunity: Idaho National Laboratory (INL), managed and operated by Battelle Energy Alliance, LLC (BEA), is offering the opportunity to enter into a license and/or collaborative research agreement to commercialize the Ion Beam Profiler technology. Overview: This technology is an ion beam profiler that can reconstruct the ion beam intensity in two dimensions with a single measurement device. There are many currently available commercial solutions, but they are overly complicated, require large manipulators that may not fit on existing systems, or require long scan times to profile the complete ion beam. This technology was conceived to use an inexpensive single-axis manipulator that can fit on the smallest standardized vacuum chamber port and provide a full beam profile construction quickly and with a single degree of motion and a single measurement device. Description: The novelty of this solution comes by using two detector elements (slit-apertures, or other ion-sensitive devices) aligned 90° from each other, and both elements aligned 45 ° with respect to the direction of motion. The two detector elements can obtain a two-dimensional profile beam using a single measurement device (picometer). Benefits: Benefits include: Cheaper Faster Easier to use Applications: Applications include: Quickly diagnose ion beam system R&D laboratory Semi-conductor Industry Development Status: TRL 7. This invention has been fabricated and tested. Software for beam reconstruction has not been finalized. INL is seeking to license the above intellectual property to a company with a demonstrated ability to bring such inventions to the market. Exclusive rights in defined fields of use may be available. Please visit Technology Deployment’s website at https://inl.gov/inl-initiatives/technology-deployment for more information on working with INL and the industrial partnering and technology transfer process. Companies interested in learning more about this licensing opportunity should contact Kala Majeti at [email protected] or 248-877-8866.