TECHNOLOGY TRANSFER OPPORTUNITY: Single Crystal SiGe/Sapphire Epitaxy (LAR-TOPS-260)

NASA's Technology Transfer Program solicits inquiries from companies interested in obtaining license rights to commercialize, manufacture and market the following technology. License rights may be issued on an exclusive or nonexclusive basis and may include specific fields of use. NASA provides no funding in conjunction with these potential licenses . THE TECHNOLOGY : NASA's Langley Research Center has developed a new, low temperature method of SiGe/sapphire growth that produces the same single crystal films with much less thermal loading effort to the substrate. This eliminates the time-consuming and costly high heating, long thermal soak times, and interfacial Si layer. Yield and throughput are increased as time to production is reduced from over 4 hours to less than 1 hour. The same quality of SiGe/sapphire is produced with far less effort and time, bringing it to within the realm of mass production. This innovation is based on a new fabrication method that alleviates the thermal loading requirement of the substrate, which previously required surface temperatures within the range of 850 to 900C. Our method employs a new thermal loading requirement of sapphire substrate for growing single crystal SiGe on sapphire substrate, in the range of 450 to 500C. SiGe/sapphire wafers produced via this process show a high reflectivity without the discoloration that appears in low quality films. To express interest in this opportunity, please submit a license application through NASA's Automated Technology Licensing Application System (ATLAS) by visiting https://technology.nasa.gov/patent/LAR-TOPS-260 If you have any questions, please contact Langley Research Center at [email protected] with the title of this Technology Transfer Opportunity as listed in this FBO notice and your preferred contact information. For more information about licensing other NASA-developed technologies, please visit the NASA Technology Transfer Portal at https://technology.nasa.gov/ These responses are provided to members of NASA's Technology Transfer Program for the purpose of promoting public awareness of NASA-developed technology products, and conducting preliminary market research to determine public interest in and potential for future licensing opportunities. No follow-on procurement is expected to result from responses to this Notice .