Xenon Di-flouride Sry Etch System

FA8601-14-R-0026SN Air Force Materiel Command, Air Force Life Cycle Management Center, Wright Patterson AFB, OH intends to negotiate with one source under the authority of FAR 13.106-1(b)(1) for the purchase of table-top xenon di-floride dry etching system. This system will be used by the AFIT Micro-electromechanical Systems Group to fabricate bulk micro-machined nano-electromechanical systems to extend research to nano-material structures. The system must provide pulsed delivery of Xenon Diflouride gas, using a single expansion chamber, to a reaction chamber capable of holding a wide variety of samples up to a 6-inch wafer. Due to limited lab space this unit must be a table-top unit with dimensions no larger than 24.5" wide X 30.7" deep X 30.3" high. Size limits include control, monitor, keyboard and pump. Chamber must be optimized to hold up to 6-inch wafers. The dry vacuum pump must be able to resist breakdown while using XeF2. The proposed sole source will be awarded to Xactix, Inc., Pittsburgh, Pennsylvania 15203. This is not a request for competitive proposals and no solicitation is available. However, all interested sources must respond in writing within four (4) days of this publication with clear and convincing evidence to support their ability to provide an alternate product. A determination by the Government not to compete this action based on responses received is solely within the discretion of the Government. Information received normally be considered solely for the purposes of determining whether to conduct a competitive procurement. Any Information or questions should be emailed to [email protected] or Faxed to Brian Smyser, AFLCMC/PZIOBB, 937-656-1412 no later than 4:00 PM Eastern on April 25, 2014. Only Inquiries/information received by this date will be considered. Be advised that all correspondence sent via e-mail shall contain a subject line that reads "FA8601-14-R-0026." Note that e-mail filters at Wright-Patterson AFB are designed to filter e-mails without subject lines or with suspicious subject lines or contents (i.e., .exe, or .zip files). Therefore, if this subject line is not included, the e-mail may not get through the e-mail filters. Also be advised that .zip or .exe files are not allowable attachments and may be deleted by the e-mail filters at Wright-Patterson AFB. If sending attachments with e-mail ensure only .PDF, .doc, or .xls documents are sent. The e-mail filter may delete any other form of attachments.