Field Emission Scanning Electron Microscope

The GSFC Detector Development Laboratory (DDL) has a requirement to acquire a scanning electron microscope with a field emission source. The system is used for high resolution imaging of micro and nanoscale structures built in the detector development laboratory. The system should be suitable for secondary electron and backscatter electron imaging at low accelerating voltages. The FESEM consists of electron optics and detectors, a specimen stage, a vacuum system, and computer control. The equipment is essential for nearly all device fabrication projects in GSFC’s Detector System Branch. In particular, the equipment is immediately needed for development for the cosmic microwave background polarization technology, microwave kinetic inductor detectors, far-infrared detectors, large format magnetic calorimeters, and microfluidic components which are important to Goddard’s lines of business. No prototypes or one-of-a-kind systems will be considered. The unit must be a production model with at least 10 similar units working in the field.